High volume cassette to cassette 200mm Automated wafer prober.
200mm Hot Chuck, gold plated
Controller RMHN4
Display Controller Module DCM3
Prober Control Module PCM
Vision Module PRM-4
OPTEM HF Video Microscope
HP 4085 Switching Matrix
stainless steel Loading / Unloading cabinet with Hepa Filter and blower
Serial No. W496100375-175373
208V, 20A, 3 phase, 50/60Hz