Temptronic thermal 200mm Automated Prober
inducing non-contacting Wafer Chuck
Temptronic TP03010B-2100-1 Temperature Controller, with IEEE InterfaceWide Temperature range: 0° to +200°C
DC Control System minimizes electrical noise
Temperature Stability :±0.1°C
Temperature Accuracy: ±0.5°C calibrated against transfer standard
Advanced ThermoChuck Design:
Low stray capacitance and high electrical resistance to ground: Surface Electrical Isolation: >109 Ohms at 500 VDC between surface and ground at +25°C ; higher isolation configurations are available
Superior chuck temperature uniformity: ±0.5°C or ±0.5% of set temperature
Guarded ( low leakage) chuck configurations are optional
System Controller RMHN4
Display Controller Module DCM3
Prober Control Module PCM
Vision Module PRM-3
OPTEM HF Video Microscope, with 2 light sources
S/N W4085090223-167053
208V, 20A, 50/60Hz